CyberOptics Corporation, a leading global developer and manufacturer of high-precision 3D sensing technology solutions, will exhibit at Semicon Europa 2022, scheduled to take place November 15–18, 2022 at the Messe München in Munich, Germany. The company will feature its next-generation WaferSense Auto Teaching System (ATS2), the new ReticleSenseAuto Teaching System (ATSR) and the In-Line Particle Sensor at Stand C1101.
ATS2 and ATSR are multi camera sensors used with CyberSpectrum software to teach accurate wafer and reticle hand-off calibration for proper alignment and set-up of semiconductor tools. The sensors „see“ inside to capture three dimensional off-set data (x, y and z) in real-time to quickly teach wafer and reticle transfer positions – all without opening the tools. Process and equipment engineers can conduct repeatable and reproducible setups and maintenance checks, speed trouble-shooting and eliminate technician-to-technician variation.
The company will also feature the In-Line Particle Sensor (IPS) with the software that detects particles in gas and vacuum lines 24/7 down to 0.1µm. The sensor is particularly relevant for EUVL tools to monitor particles in-line. The device is an extension of the industry-leading Airborne Particle Sensor (APS/APSRQ) technology that is documented by fabs as the Best-Known Method (BKM).
WaferSense and ReticleSense sensors are widely used for various applications including leveling, vibration, gapping, relative humidity, resistance and airborne particles. Semiconductor fabs worldwide rely on these real-time measurement sensors to improve yields, processes and tool uptime.
Semicon Europa, Stand C1101
