Keithley Instruments has qualified FormFactor, Livermore, California, to manufacture high performance parametric test probe cards for its semiconductor parametric testers. The probe cards will be used with S600 Series parametric testers to measure very low-level DC currents as well as standard DC parametric tests on pins that contact a semiconductor wafer. Wafer fabricators and foundries employ the testers to qualify wafers for assembly and packaging as well as process monitoring.
Takumi probe cards are well suited to applications involving Keithley’s most advanced parametric tester, the Model S680 DC/RF Parametric Test System. It is designed for wafer-level parametric testing of advanced logic, memory, and analog ICs. In a single test system, the model combines parallel testing capability, high DC sensitivity, femtoamp-level resolution, and RF s-parameter measurements up to 40 GHz. This reportedly provides the industry’s highest throughput and a lower cost of ownership for measurements at the 65 nm node and beyond.
The Model S680 is ideal for sensitive, high speed testing. Its signal preamplifiers, located in the test head, boost low level signals within centimeters of the probe needles, then transmit the boosted signals over cables to the measurement instruments in the system cabinet. This approach eliminates the speed and sensitivity losses that typically result from cable and switch matrix effects. External instruments can be directly connected to the probe needles using the eight general-purpose pathways.
Semicon Europa 2007, stand 1069
EPP Europe 456
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