Semiconductor-packaging
Canon Launches FPA-6400ES6a KrF Lithography System with 400 Wafers-per-Hour Throughput
10. November 2026Canon has announced the FPA-6400ES6a KrF scanner for semiconductor lithography, combining a throughput of 400 wafers per hour with industry-leading overlay accuracy of 4.0 nm and the ability to handle wafer warpage of…