Advantages of the rotary stage include continuous or limited travel, good accuracy and repeatability, a cog-free motor for smooth motion, zero gear backlash, low wobble and bearing run-out, and no accuracy changes over time due to gear wear.
The stage is ideal for laser micromachining applications and wafer processing, among others. Resolution (microns/arc seconds) is 0.25 µm in the Z-axis, and 0.72 arc seconds in the theta-axis; repeatability of ±2 µm in the Z-axis, and ±1 arc second for theta.
EPP Europe 412
