The core of the MX product series is its patented Si-Thru technology, whose light sources generate highly efficient illumination in the near-infrared range. Silicon with most types and concentrations of doping is transparent to light within this range, so even subsurface defects can be inspected easily. Additional system highlights include: scalability; high performance capability; and high-resolution light sources. Program generation and maintenance are quickly and easily accomplished through the graphical user interface (GUI).
Evaluation is based on specialized inspection algorithms which positively locate defects such as voids, seam widths, etc. Complete statistical process control and integrated process control (barcode, data matrix code, OCR) allow each individual wafer to be directly identified.
EPP Europe 467
