A wide variety of accessories and options allow the system to be used with wavelengths from 157 nm through 1064 nm. Industry leading galvanometer technology permits f-theta lens from 100 to 254 mm focal length to be used with fields of view up to 170 x 170 mm. The moving mirrors of the galvanometer provide rapid scanning over a large area with reasonable accuracy. The system also includes fixed beam delivery optics for applications which demand the highest precision. The system also utilizes JSPA’s high accuracy motion control equipment including XY stages up to 200 x 200 mm and high precision Z-Theta stage technology. A variety of vacuum chuck designs are offered for general purpose and specialty configurations.
In making the announcement, Bill Kallgren, Sales Manager, said, “The IX-100-C allows R&D researchers, job shops, or universities a single tool which can be used with any number of lasers and laser types. The system can easily be configured for Excimer, DPSS and Ultrafast lasers on a single platform. Due to the high accuracy of the IX-100-C, the user can quickly and fully exploit the laser being used and experience rapid development of laser applications and process parameters.”
EPP Europe 537
