ASML Holding and imec, a leading research and innovation hub in nanoelectronics and digital technologies, have announced the signing of a new strategic partnership agreement. The agreement, which focuses on research and sustainability, has a duration of five years. It aims to deliver valuable solutions in two areas by bringing together ASML and imec’s respective knowledge and expertise. Firstly, it aims to develop solutions that advance the semiconductor industry and, secondly, it aims to develop initiatives focused on sustainable innovation.
The collaboration incorporates ASML’s whole product portfolio, with a focus on developing high-end nodes, using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology and HMI single- and multi-beam technologies. These tools will be installed in imec’s state-of-the-art pilot line and incorporated in the EU- and Flemish-funded NanoIC pilot line, providing the most advanced infrastructure for sub-2nm R&D to the international semiconductor ecosystem. The focus of R&D in the partnership will also include silicon photonics, memory and advanced packaging, offering full stack innovation for future semiconductor-based AI applications in diverse markets.
A new area in the collaboration consists of a significant contribution to fund innovative ideas and activities in imec’s research funnel that bring environmental and societal benefits.
ASML’s president and CEO Christophe Fouquet commented: “This agreement marks the next step in the longstanding co-operation between ASML and imec. It signals our joint ambitions to develop solutions for the semiconductor industry and fits our strategy of investing in technology and innovation that will benefit society at large.”
“We are excited to continue our longstanding unique partnership with ASML, offering the industry access to the most advanced patterning solutions for over 30 years,” stated Luc Van den hove, President and CEO at imec. He continued: “The inclusion of ASML’s full product portfolio will allow us to expand and further mature the capabilities of our pilot line, providing the entire semiconductor ecosystem with the most advanced R&D to tackle the challenges of AI-driven technological advancements. Since imec has a strong focus on sustainable innovation, having this explicitly included in our partnership is a great addition.”
The ASML investment in the partnership is complemented with funding made available by the Chips Joint Undertaking and the Flemish government for the realization of the EU Chips Act NanoIC pilot line; and by the Dutch government as an Important Project of Common European Interest.
The acquisition and operation of the NanoIC pilot line are jointly funded by the Chips Joint Undertaking, through the European Union’s Digital Europe (101183266) and Horizon Europe programs (101183277). Additional funding comes is supplied by the participating states: Belgium (Flanders), France, Germany, Finland, Ireland and Romania. For more information, visit: nanoic-project.eu.
Making 0.55 NA technology available at imec was part of the Next Gen-7A project (IPCEI22201) funded by the Dutch government as an Important Project for Common European Interest (IPCEI). For more information, visit IPCEI ME/CT.
