Increased miniaturization of pads and the resulting greater need for vertical and horizontal resolution were crucial for expansion of 3D technology into end-of-line inspection. The use of angled views already allowed for observation from various viewing directions in order to reliably detect critical errors in the fine-pitch range. To meet the latest as well as future requirements in electronics manufacturing, not only must the inspection object as a whole be reliably detected, but each individual point of the object as well. This problem is now solved in the XM module with the help of a structured light projector and a multi-step laser triangulation procedure. Here, the company relies on the unique, optimal principle of a structured light projector, whose projection is picked up by four or eight side-looking cameras.
In conjunction with the powerful XM module, this configuration produces an optimal combination of all individual measurement principles in the AOI area, creating a comprehensive optical inspection system. With an image acquisition rate up to 1.8 gigapixels/second, the new XM module is extremely fast and because of additional high resolution, it is able to incorporate all information with maximum speed into a highly precise 3D inspection. The unique, flexible camera projector configuration, which uses the existing angular AOI cameras, allows for , uncomplicated 3-D retrofit by only installing the structured light projector since the cameras are already present in the AOI system.
Productronica, Booth A2.177





