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Automated inspection of wafers and chips in trays
1. April 2003The Topcon's Vi-series high-res wafer inspection systems (European rep Macrotron Process Technologies) provide defect detection and inner IC dimension
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The Topcon's Vi-series high-res wafer inspection systems (European rep Macrotron Process Technologies) provide defect detection and inner IC dimension

Topcon (represented in Europe by Macrotron Process Technologies) introduces its Vi-series, a universally applicable high-res inspection system which is