Keithley’s S600DC/RF APT is reportedly the industry’s fastest parametric system for integrated DC and RF wafer measurements. It can execute independent DC and RF tests parallel on separate probes, greatly reducing the time and cost of tests on advanced devices. This system incorporates Anritsu vector network analyzer and DC/RF probe card technologies, supporting “lights out” factory automation, and is compatible with 200 and 300mm probers. It allows testing up to 10GHz at throughput rates up to ten-times faster than typical rack-and-stack systems. RF connections embedded on the test head and per-pin-electronic eliminate manual setup and supply precision and repeatability. The probe card loads in the same way that it does for DC operation, and the RF capabilities can be accessed through a transparent interface. Test results can be easily imported into a variety of popular device modeling packages, such as BSIMPro, IC-CAP and UTMOST. The repeatable RF measurements on 2-port/4-terminal parameters correlate well with results from other RF parametric test systems. Its 1kHz resolution makes it far easier to “dial in” the desired frequency than with typical rack-and-stack systems. The DC precision is 1pA/10µV.
