ATS2 and ATSR are multi camera sensors used with CyberSpectrum software to teach accurate wafer and reticle hand-off calibration for proper alignment and set-up of semiconductor tools. The sensors „see“ inside to capture three dimensional off-set data (x, y and z) in real-time to quickly teach wafer and reticle transfer positions – all without opening the tools. Process and equipment engineers can conduct repeatable and reproducible setups and maintenance checks, speed trouble-shooting and eliminate technician-to-technician variation.
The company will also feature the In-Line Particle Sensor (IPS) with the software that detects particles in gas and vacuum lines 24/7 down to 0.1µm. The sensor is particularly relevant for EUVL tools to monitor particles in-line. The device is an extension of the industry-leading Airborne Particle Sensor (APS/APSRQ) technology that is documented by fabs as the Best-Known Method (BKM).
WaferSense and ReticleSense sensors are widely used for various applications including leveling, vibration, gapping, relative humidity, resistance and airborne particles. Semiconductor fabs worldwide rely on these real-time measurement sensors to improve yields, processes and tool uptime.
Semicon Europa, Stand C1101
