Carl Zeiss SMT introduced its newly developed Auriga CrossBeam (FIB-SEM) work-station. As one of the pioneers in developing this class of instruments, and with more than 8 years of FIB-SEM experience, the company incorporated a huge number of innovations in the new Auriga. New chamber design and unique charge compensation system for advanced analytics, chemical analysis, crystallographic information, the complete morphology, electrical information … the number and complexity of tasks required to obtain an extensive sample characterization on the nanometer scale is unlimited, as is the number and variety of samples. Therefore, flexibility is a must. In order to meet this requirement, Auriga has a completely redesigned vacuum chamber, which now includes a total of 15 ports for different detectors. Additionally, an unrivaled charge compensation system enables the local application of an inert gas flush. In this way, electrostatic charging of non-conductive samples is neutralized and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Also EDS, EBSD, SIMS and many more analytical methods benefit from this technology, supporting numerous applications in materials analysis, life sciences and semiconductor technology.
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