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CyberOptics to launch next-generation sensors for wafer, reticle hand-off­ calibration

Semiconductor manufacturing
CyberOptics to launch next-generation sensors for wafer, reticle hand-off­ calibration

The company's CyberSpectrum software display

Source: CyberOptics

CyberOptics Corporation, a global developer and manufacturer of high-precision 3D sensing technology solutions, will launch its next-generation WaferSense Auto Teaching System (ATS2) and new ReticleSense Auto Teaching System (ATSR) at the SEMICON West 2022 HYBRID show in San Francisco scheduled to take place from 12-14 July 2022.

ATS2 and ATSR are multi camera sensors used with the company’s CyberSpectrum software to teach accurate wafer and reticle hand-off­ calibration for proper alignment and set-up of semiconductor tools. The sensors „see“ inside to capture three dimensional o­ff-set data (x, y and z) in real-time to quickly teach wafer and reticle transfer positions – all without opening the tools, the company explained. Process and equipment engineers can conduct repeatable and reproducible setups and maintenance checks, speed trouble-shooting and eliminate technician-to-technician variation.

“Semiconductor fabs worldwide are using our teaching sensors that are recognized as the most efficient and effective wireless devices for wafer hand-off teaching,” said Dr. Subodh Kulkarni, President and CEO, CyberOptics. “We have advanced the technology to enable even better performance, with the combination of accuracy, precision and versatility that fabs rely on to significantly improve their yields and tool uptime.”


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