NanoPhotonics provided International Sematech Manufacturing Initiative (ISMI) with 450 mm surface and 450 mm edge defect inspection tools. Both tools are based on the proven design of the companies’ bolts compatible MetriCube series. It provides an independent class 1 mini environment and can be attached to a 450 mm host tool. he Reflex 50 dark field laser surface inspection tool detects particles, scratches, area defects, and haze on un-patterned 450 mm semiconductor wafer surfaces. Sophisticated Automatic Defect Classification (ADC) enables automatic sorting according to user selectable criteria for various defect classes. The Edge Inspection System BevelCam MC 450 is a tool for the automated, camera based inspection of the edge region of 450 mm wafers. It allows obtaining dark field as well as bright field images of the wafer edge, i.e. bevel, apex, and the surface regions close to the edge, as well as the notch. After image acquisition the dark field and bright field information is used by a classification engine to bin the defects into various defect classes: Chipout, cracks, scratches, area defects, particles and custom classes and notch contour defects. Typical applications are: Qualification of wafer handling equipment, process equipment and supporting the manufacturers of 450 mm wafers in an early stage. NanoPhotonics AG is situated in Mainz, Germany.
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