The March FlexTrak system is capable of both direct and downstream ion-free plasma processing for treating an even broader range of semiconductor devices. It is claimed to be the only commercially available, high-throughput plasma system with flexible gas dynamics, focused on high-speed, in-line manufacturing operations and for standalone configurations. The flexible architecture accommodates a variety of devices from individual strips to magazine carriers for flip-chip or chip-scale packages. The platform can be integrated with a handling robot for treating wafers up to 300mm, or configured with other magazine/strip handling equipment. With throughput capability of 480 substrates/hour, the system with its three-axis symmetrical chamber provides high treatment uniformity and short cycle times. Multiple plasma modes allow choice of any process gas. A graphical interface allows for easy touch-screen programming. The platform is both internet and LAN-ready, and real-time process representation allows statistical data gathering. The system easily integrates with most process equipment, including wirebond, die attach, dispense, mold and marking equipment. It is SMEMA and SECS-GEM II compliant.
EPP EUROPE 448
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