The Olympus MX61 microscope improves semiconductor inspection by increasing defect detection leading to more reliable results. This is achieved through automatically optimized contrast for any magnification and access to sophisticated contrast methods. In addition, an intuitive operation scheme minimizes errors and reduces the variation of results between different operators to a minimum. The concept of the instrument is focused on maximising efficiency. The small footprint makes it easy to design workplaces that are cost-effective and practice-opriented. The slim frame reduces the transfer distance from wafer-handling systems to the microscope stage. This increases the speed and minimizes the contamination risk. An anti-static treatment and a sealing of the motorized revolving nosepiece avoids generation and deposition of particles. For optimum contrast and resolution, the aperture stop automatically opens or closes with the objective change. The newly developed illumination in combination with the fluorite objective lens provide higher field contrast than comparable microscopes. This is also more comfortable for human eyes, ensuring reliable and constant results and minimizing variations between operators. Thanks to its modular concept and the communication interface, the instrument can easily be adapted to changing needs such as higher automation or resolution or other contrast techniques. Modules are available for real-time auto focus, automated wafer handling, disc-scanning confocal, fluorescence and infrared microscopy as well as transmitted light.
EPP EUROPE 449
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