Homepage » Semiconductor Packaging »

Next-Generation WaferSense & ReticleSense Auto Teaching Systems

CyberOptics
Next-Generation WaferSense & ReticleSense Auto Teaching Systems

CyberSpectrum Software
CyberSpectrum software illustrating the teach application with ATSR. Source: CyberOptics

CyberOptics will launch its next-generation WaferSense Auto Teaching System (ATS2) and new ReticleSense Auto Teaching System (ATSR).

ATS2 and ATSR are multi camera sensors used with CyberSpectrum software to teach accurate wafer and reticle hand-off calibration for proper alignment and set-up of semiconductor tools. The sensors „see“ inside to capture three dimensional off-set data (x, y and z) in real-time to
quickly teach wafer and reticle transfer positions – all without opening the tools. Process and equipment engineers can conduct repeatable and reproducible setups and maintenance checks, speed trouble-shooting and eliminate technician-totechnician variation.

CyberSpectrum Software
CyberSpectrum software illustrating the teach
application with ATSR.

“Semiconductor fabs worldwide are using our teaching sensors that are recognized as the most efficient and effective wireless devices for wafer hand-off teaching,” said Dr. Subodh Kulkarni, President and CEO, CyberOptics. “We have advanced the technology to enable even better performance, with the combination of accuracy, precision and versatility that fabs rely on to significantly improve their yields and tool uptime.”

CyberOptics also will demonstrate WaferSense sensors for leveling, vibration, gapping, relative humidity, resistance and airborne particles.


Industrie.de Infoservice
Vielen Dank für Ihre Bestellung!
Sie erhalten in Kürze eine Bestätigung per E-Mail.
Von Ihnen ausgesucht:
Weitere Informationen gewünscht?
Einfach neue Dokumente auswählen
und zuletzt Adresse eingeben.
Wie funktioniert der Industrie.de Infoservice?
Zur Hilfeseite »
Ihre Adresse:














Die Konradin Verlag Robert Kohlhammer GmbH erhebt, verarbeitet und nutzt die Daten, die der Nutzer bei der Registrierung zum Industrie.de Infoservice freiwillig zur Verfügung stellt, zum Zwecke der Erfüllung dieses Nutzungsverhältnisses. Der Nutzer erhält damit Zugang zu den Dokumenten des Industrie.de Infoservice.
AGB
datenschutz-online@konradin.de