The X-ray inspection system Gemini from X-Tek provides a second, uninterrupted oblique view of the sample, with an inspection angle of 75 degrees and magnifications up to 6000x. It utilizes a 160kV vacuum demountable tube design with transmission target where the electron beam is focused directly onto the X-ray output port with a focal spot size of 2 micron. The inspected sample can be placed as close as 0.25mm away from the focal spot, maximizing magnification. Sample manipulation is made easy by the use of a variable speed, programmable manipulator, operating five axes and controlled either manuallyby joystick or by automated software routines.
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