Keithley Instruments has published a reference handbook titled Overcoming the Measurement Challenges of Advanced Semiconductor Technologies: DC, Pulsed, and RF – From Modeling to Manufacturing. The 140-page guide describes the demanding measurement challenges for semiconductor manufacturers as they move into the 65nm-technology and beyond. The booklet is available at no charge by sending an email note. The manual draws from the collective experience of the company’s parametric test and device characterization experts and its customers. It covers a variety of emerging technologies and processes, such as challenges in RF wafer testing; gate dielectric reliability testing; charge pumping and reliability; high-frequency capacitance measurement; copper via testing; and advanced DC measurements. And it also contains a glossary of commonly used terms in this industry, including test and measurement terminology.
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